metrology

The PETMEM device exploits the electro-mechanical properties of sub-micron structures formed from multilayer thin films of PE and PR materials. The materials development and device activities are strongly dependent on the characterisation of these thin films and multilayers, and will drive a rapid development of appropriate techniques and methodologies. We combine well-calibrated state-of-the-art techniques with techniques (developed in a Metrology work package) which have been enhanced to address the specific characterisation challenges presented by PETMEM, or which are applied to these materials for the first time (see Table below). The suite of methods includes macroscopic and microscopic investigation of the PE materials, new techniques to characterise the metal-PE interface, high pressure studies of the PR materials, laser ultrasonic measurements of the acoustic properties and high-speed methods for characterisation of the PETMEM device.

 

Characterisation methods within PETMEM, showing current state of the art, first application of techniques to the materials and structures encountered in PETMEM, and techniques which need to be advanced beyond current art.

Technique

Current Art

New Application

Advanced technique

Strain displacement

 

X

X

PFM+EBSD

X

 

 

Pressure measurements

X

 

 

Ultrasonics

X

X